Old Web
English
Sign In
Acemap
>
Paper
>
Development of Yttrium Oxide Deposition Process using Microwave Excited Atmospheric Pressure Plasma Jet
Development of Yttrium Oxide Deposition Process using Microwave Excited Atmospheric Pressure Plasma Jet
2021
BatOrgil Oogii Erdenezaya
Ryosuke Shimizu
Sai Ngaunn Hseng
Kenta Kametani
Takeshi Aizawa
Yusuke Nakano
Yasunori Tanaka
Tetsuya Taima
Tatsuo Ishijima
Keywords:
Materials science
Analytical chemistry
Jet (fluid)
Plasma-enhanced chemical vapor deposition
Atmospheric-pressure plasma
Oxide
Yttrium
Microwave
Excited state
Ion source
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]