A Silicon Gyroscope With Electronic Frequency Tuning

In micromachined gyroscopes, the vibrating masses are generally coupled by one of two means. The most common means is mechanical, meaning a spring or equivalent structure links the two masses. Alternatively, the coupling is produced electrostatically, where the displacement of the masses causes the gap of a capacitive structure to vary. In this paper, a new approach called electronic coupling is employed. The tuning structure and circuit are presented. Simulation results are discussed.Copyright © 2006 by ASME