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Nanoporous SiOCH Thin Films: from Sol Gel to PECVD
Nanoporous SiOCH Thin Films: from Sol Gel to PECVD
2007
V. Jousseaume
Laurent Favennec
Aziz Zenasni
Olivier Gourhant
Patrick Maury
J.P. Simon
Keywords:
Thin film
Composite material
Nanoporous
Sol-gel
Plasma-enhanced chemical vapor deposition
Materials science
Chemical engineering
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