An Improved Design Method of the MEMS-Based Folded-Beam Micromirror

In this paper, the folded-beam torsion MEMS mirror that meets a set of specified constraints was developed. An optimization algorithm that we newly adopted in the RCS(restricted competition selection) GA(genetic algorithm) could overcome some difficulties in single-search algorithms. Moreover, by the proposed method, the designer’s experience, and view and judgment could be reflected effectively.