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A Study of Module using MEMS Inertial Sensor by Multi-layer Metal Technology (2)
A Study of Module using MEMS Inertial Sensor by Multi-layer Metal Technology (2)
2018
Tatsuya Koga
Motohiro Takayasu
Daisuke Yamane
Hiroyuki Ito
Toshifumi Konishi
Shiro Dosho
Noboru Ishihara
Katsuyuki Machida
Kazuya Masu
Keywords:
Inertial frame of reference
Microelectromechanical systems
Electronic engineering
Metal
Materials science
multi layer
Optoelectronics
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