Parameterised equivalent circuit model of frequency-dependent resistance and inductance for on-chip coplanar waveguides up to 110 GHz

A parameterised wideband equivalent circuit model capturing the per-unit-length (p.u.l.) frequency-dependent resistance and inductance of on-chip coplanar waveguides (CPWs) is presented. The parameterised model for on-chip CPWs is suitable for various process nodes and over a large geometry range with signal line width-to-thickness ratios w s / t between 1 and 15 and spacing-to-thickness ratios s / t between 0.25 and 15. The model has been validated by both EM simulation and measurements of fabricated test chips. The model is accurate to within 10% over the normalised geometry range. The model can easily be implemented into standard circuit simulators.