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Fabrication of tapered edgewall apertures using grayscale lithography
Fabrication of tapered edgewall apertures using grayscale lithography
2013
Kian Shen Kiang
Sumit Kalsi
Daniel Ritter
Nezih Ünal
Hywel Morgan
Iain Anteney
Harold Chong
Maurits R.R. de Planque
Keywords:
Nanotechnology
Fabrication
Grayscale
Lithography
Electronic engineering
Aperture
Engineering
grayscale lithography
Correction
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