A compact deflecting electrostatic lens converging the ion beam

The present invention relates to achieve mass ion optical system converging the ion beam deflection function, specifically to the field of the ion beam by electrostatic deflection angle adjusted to achieve a radially converging ion beam and an ion-optical lens function. The lens small size, compact structure, comprising a main lens electrode assembly and the three-dimensional positioning insulation assembly, are sequentially applied with different voltages; ion beam starts in the lens axis direction, after the main lens electrodes, the movement direction of the ion beam is deflected, and in converge in the radial direction is generated. Deflection angle may be adjusted by a voltage difference between the electrodes of the main lens, the focus of convergence is adjusted by the potential of the main lens. An electrostatic lens system compact deflecting the converging ion beam according to the present invention, using as little power module, and control the ion beam deflection angle will focus plane, and to reduce the ion transmission losses.