Transparent conductive Al doped ZnO thin films produced by pulsed laser deposition

Highly textured pure and Al-doped ZnO thin films have been produced by pulsed laser deposition, for applications such as transparent electrodes. The crystalline quality, optical transmission and electrical properties of the films strongly depended on the presence of the Al dopants. All the films showed 82 - 90% optical transparency in the visible (VIS) and near infrared (IR) spectral ranges. The films prepared at 300 °C substrate temperature and 0.05 mbar oxygen pressure, mAlNtAlNed during deposition, had a resistivity of 2.4×10 -4 Ω cm.