A thin film piezoelectric actuator

The present invention discloses a thin film piezoelectric actuator, comprising a driving portion, one end of at least one support anchor member, the driving portion comprises: a piezoelectric film; a first region disposed under the piezoelectric thin film of a bottom electrode; a second electrode at a second region distinct from the first region of the piezoelectric film disposed below; a first upper electrode on the piezoelectric film and the lower electrode is disposed opposite to the first; a second upper electrode on said piezoelectric thin film and the second lower electrode disposed opposite; lower connecting the first and the second upper electrode through the first via hole is formed on the piezoelectric film a first connection electrode member; and a second connection member connecting the second lower electrode and the first upper electrode through a second via hole formed on the piezoelectric film.