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微細構造,Ti W Al N複合膜の機械的及びトライボロジー特性に及ぼすAl含有量の影響【Powered by NICT】
微細構造,Ti W Al N複合膜の機械的及びトライボロジー特性に及ぼすAl含有量の影響【Powered by NICT】
2017
Yu Lihua
Chen Jian
Ju Hongbo
Dong Hongzhi
Zhao Hongjian
Keywords:
Atomic physics
Physical chemistry
Chemistry
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