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Effect of Strain on the Epitaxy of B-Doped Si0.5Ge0.5 Source/Drain Layers
Effect of Strain on the Epitaxy of B-Doped Si0.5Ge0.5 Source/Drain Layers
2021
Gianluca Rengo
Clement Porret
Andriy Hikavyy
Erik Rosseel
Mustafa Ayyad
Richard J. H. Morris
Geoffrey Pourtois
Roger Loo
André Vantomme
Keywords:
Materials science
Strain (chemistry)
Epitaxy
Analytical chemistry
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