Particle beam system and methodology for this purpose

Examination method comprises focusing a particle beam onto a sample; Operating at least one detector arranged close to the sample; Assigning different from the at least one detector output detection signals to intensity intervals; Determining at least a first signal component, which goes back to impinging on the detector electrons from the assigned to the intensity intervals in response to detection signals; and determining at least one second signal component, which goes back to the detector impinging X-rays, depending on the intensity of the intervals associated with detection signals.