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Superconducting NbTin Thin Films with Highly Uniform Properties over a ∅ 100 mm Wafer
Superconducting NbTin Thin Films with Highly Uniform Properties over a ∅ 100 mm Wafer
2017
David J. Thoen
Boy Gustaaf Cornelis Bos
E. A. F. Haalebos
T. M. Klapwijk
J. J. A. Baselmans
Akira Endo
Keywords:
superconducting thin films
Wafer
Thin film
Condensed matter physics
Physics
Superconductivity
kinetic inductance detectors
Correction
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