A fast 2D/3D optical profilometer for wide range topographical measurement

Abstract An optical profilometer, based on a triangulation principle, has been designed to measure the topography of surfaces. It uses a laser diode source ( λ = 0.788 μm ) and position sensing detectors. Response is obtained with a minimum of error due to a double detection system. Sensitivity is about ±3 μm for a vertical range of 1 mm. Vertical range can attain 5 mm, and more than 10 mm with a wide range numerical arrangement. Non-contact with the surface means a scanning speed of about 4 mm s −1 , and a 512 × 512 matrix (with a 12 bit definition) can be created in 9 min.