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Planar transistors and impatt diodes with ion implantation
Planar transistors and impatt diodes with ion implantation
1979
H. Dorendorf
H. Glawischnig
L. Grasser
J. Hammerschmitt
Keywords:
Boron
Planar
Optoelectronics
Diode
Transistor
Ion implantation
Materials science
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