Airtight sintering device of glass tube and MEMS chip

The present invention discloses a MEMS chip and the glass tube airtight sintering apparatus comprising a base body, a heating furnace body, and a lifting member height-adjustable pressure regulating handle, exhaust valves and connections or the like. Apparatus of the present invention, the use of two glass tubes sintered together with the MEMS chip, and the glass tube is connected to vacuum apparatus was evacuated, and the glass tube by a glass frit so that the two MEMS chip sintered together, forming a vacuum micro-chamber solution the glass paste in a conventional sintering apparatus to produce organic gas released in the vacuum chamber can not be excluded micro problems, degree of vacuum of up to 5 × 10-6Pa, and improve the yield of high-precision pressure sensor resonator products. And an integrated circuit packaging process of the present invention is suitable for manufacturing MEMS fabrication resonant pressure sensor.