All-parameter controllable preparation method for super-hydrophobic micro-nano composite structure

The invention discloses an all-parameter controllable preparation method for a super-hydrophobic micro-nano composite structure, belonging to the technical field of preparation of micro-nano structures. The method is as follows: preparation of a micro structure and preparation of a nano structure are combined; preparation of the micro structure is realized through layered preparation, namely photoetching; preparation of the nano structure is realized through soft etching of colloid and bulk silicon etching; and composition of the micro structure and the nano structure is realized by compositing a nano microsphere mask with a micro structure array. The method provides research basis for scientific research and engineering practice of a super-hydrophobic surface of the micro-nano structure; the macro phenomenon and the micro structure of a material surface are effectively combined together; basis is provided for exploring physicochemical property of the super-hydrophobic surface quantitatively and qualitatively; the method is that soft etching of colloid and bulk silicon etching are combined together; and thus, the all-parameter controllable preparation method disclosed by the invention has the advantages of being high in process controllability, simple to operate, low in cost and high in processing precision.