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Influence of RF plasma power on structural properties of AlN thin layers grown by PAMBE on Si (111)
Influence of RF plasma power on structural properties of AlN thin layers grown by PAMBE on Si (111)
2012
Mahesh Pandikunta
Oleg Ledyaev
S. A. Nikishin
Keywords:
Plasma
Thin layers
Analytical chemistry
Materials science
Optoelectronics
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