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EPL electron optics performance on test stand.
EPL electron optics performance on test stand.
2003
Muneki Hamashima
Shinichi Kojima
Takaaki Umemoto
Hiroyasu Shimizu
Junji Ikeda
Atsushi Yamada
S. Takahashi
Takehisa Yahiro
Sumito Shimizu
K. Okamoto
Takeshi Yamaguchi
S. Miura
Shintaro Kawata
Kazuaki Suzuki
Keywords:
Optics
Nonlinear distortion
Electron optics
Materials science
Depth of focus
Correction
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