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Codeposition of Compounds by Chemical Vapor Deposition in a Fluidized Bed of Particles
Codeposition of Compounds by Chemical Vapor Deposition in a Fluidized Bed of Particles
2008
J.L. Kaae
Keywords:
Hybrid physical-chemical vapor deposition
Coating
Chemical vapor deposition
Combustion chemical vapor deposition
Deposition (phase transition)
Fluidized bed
Inorganic chemistry
Materials science
Deposition (law)
Chemical engineering
Microstructure
Correction
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