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Characteristics and crystal structure of the Ba(Zr x Ti 1− x )O 3 thin films deposited by RF magnetron sputtering
Characteristics and crystal structure of the Ba(Zr x Ti 1− x )O 3 thin films deposited by RF magnetron sputtering
2002
Moo-Chin Wang
Chung Yi Chen
Chi-Shiung Hsi
Nan-Chung Wu
Keywords:
Scanning electron microscope
X-ray crystallography
Crystallography
Thin film
Crystal structure
Sputter deposition
Chemistry
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