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Breaking the Doping Limit in Silicon by Deep Impurities
Breaking the Doping Limit in Silicon by Deep Impurities
2019
Mao Wang
A. Debernardi
Y. Berencén
R. Heller
Chi Xu
Ye Yuan
Yufang Xie
Roman Böttger
Lars Rebohle
Wolfgang Skorupa
Manfred Helm
Slawomir Prucnal
Shengqiang Zhou
Keywords:
Condensed matter physics
Silicon
Impurity
Doping
Materials science
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