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Growth and Characterization of Gallium Nitride (GaN) Thin Films by Pecvd
Growth and Characterization of Gallium Nitride (GaN) Thin Films by Pecvd
2004
Hasan Mahmood
Susan G. Moore
Daqinq Zhang
David Nevil McIlroy
Keywords:
Nitrogen
Gallium
Plasma-enhanced chemical vapor deposition
Thin film
Gallium nitride
Inorganic chemistry
Ceramic materials
Materials science
Crystal structure
Combustion chemical vapor deposition
Nitride
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