Production method of light sensing unit of light sensing array and structure thereof
2016
The invention discloses a production method of a light sensing unit of a light sensing array. The production method is characterized in that a substrate is provided, and an active element can be formed in the unit area of the substrate; a first electrode layer is formed in the unit area of the substrate, and the first electrode layer is electrically connected with the active element; the active element is provided with a protection layer; the protection layer is provided with a shielding layer to shield the active element; after the shielding layer is formed, the light sensing layer can be formed on the protection layer in the unit area; and the light sensing layer can be provided with a second electrode layer.
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