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Automated Precision Position Detecting Technique Applied in a Mask Aligner for LSI Fabrication
Automated Precision Position Detecting Technique Applied in a Mask Aligner for LSI Fabrication
1981
Mitsuyoshi Koizumi
Nobuyuki Akiyama
Yoshimasa Oshima
Asahiro Kuni
Keywords:
Computer vision
Engineering drawing
Artificial intelligence
Fabrication
Computer science
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