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Design and Characterization of Silicon Cantilevers for Use as Force and Torque Sensors
Design and Characterization of Silicon Cantilevers for Use as Force and Torque Sensors
2007
Michelle D. Chabot
Keywords:
Non-contact atomic force microscopy
Torque
Analytical chemistry
Finite element method
Cantilever
Magnetic force microscope
Silicon
Materials science
Optoelectronics
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