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ALD/PEALD CMOS Compatible Oxide for Resistive RAM
ALD/PEALD CMOS Compatible Oxide for Resistive RAM
2011
A. Salaün
Virginie Beugin
H. Grampeix
C. Licitra
N. Rochat
E. Martinez
P. Gergaud
P. Gonon
C. Vallée
C. Mannequin
Clement Gaumer
Simon Jeannot
J. Buckley
V. Jousseaume
Jean-Paul Barnes
M. Veillerot
F. Pierre
I. Kieffer
Keywords:
Oxide
Resistive random-access memory
CMOS
Electronic engineering
Materials science
Optoelectronics
cmos compatible
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