High‐Speed Preparation of Highly (100)‐Oriented CeO2 Film by Laser Chemical Vapor Deposition
2016
Keywords:
- Hybrid physical-chemical vapor deposition
- Thin film
- Ion plating
- Plasma processing
- Combustion chemical vapor deposition
- Materials science
- Electron beam physical vapor deposition
- Inorganic chemistry
- Plasma-enhanced chemical vapor deposition
- Pulsed laser deposition
- Composite material
- Optoelectronics
- Atomic layer deposition
- Correction
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- Cite
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