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Strain Characterization of Advanced CMOS Transistors: An Industry Perspective
Strain Characterization of Advanced CMOS Transistors: An Industry Perspective
2018
Jiong Zhang
Xiaojun Weng
Renliang Yuan
Ling Pan
Han Li
Markus Kuhn
Kevin Johnson
Jian-Min Zuo
Zhiyong Ma
Keywords:
Metallurgy
Transistor
CMOS
Materials science
Electronic engineering
Strain (chemistry)
Engineering physics
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