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Charge gas and discharge parameters influence on kinetic and nucleation in RF Ar/C2H2 plasmas
Charge gas and discharge parameters influence on kinetic and nucleation in RF Ar/C2H2 plasmas
2021
Gautier Tetard
Armelle Michau
S. Prasanna
Jonathan Mougenot
Pascal Brault
Khaled Hassouni
Keywords:
Kinetic energy
Nucleation
Materials science
Charge (physics)
Plasma
Atomic physics
Correction
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