Optical Properties and Morphology of Diamond-Like Films Obtained in a Supersonic Flow of a Hydrocarbon Plasma
2011
A possibility of using a new method of film synthesis in a supersonic flow of a hydrocarbon plasma generated by a disk-type magnetohydrodynamic accelerator is demonstrated. Two methods are used for characterization of diamond-like carbon films: nondestructive spectroscopic ellipsometry and atomic-force microscopy.
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