A Durable Sensor for Blood Cell Counter Using MEMS Technology

In this study, a durable sensor device for blood cell counter has been developed using MEMS technology. The number of blood cells in human blood can be counted and checked with 10 mm × 5 mm silicon MEMS device. Aperture-impedance method was used to detect blood cells as voltage signals. As a result of investigations, suitable materials for the electrode of the device have been found. First, latex particles were used to confirm the operation of the blood cell counter instead of blood and finaly actual blood was measured. The size difference of latex particles and concentration of latex particles were successfully recognized from the height of voltage pulse and the number of pulses, respectively.