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Photo acoustic wave measurement using MEMS piezoresistive pressure sensor
Photo acoustic wave measurement using MEMS piezoresistive pressure sensor
2021
Yuta Mizuno
Kentaro Noda
Takuya Tsukagoshi
Takumi Tamamoto
Kenichi Koyanagi
Toru Oshima
Isao Shimoyama
Keywords:
photo acoustic
piezoresistive pressure sensors
Microelectromechanical systems
Optoelectronics
Materials science
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