MEMS device systems design and verification tools for smart structures

Integration of smart materials and control circuitry with MEMS devices to form smart structures is becoming an important technology. With the development of smart microsystems, integrated design tools become a growing need. We have developed a CAD tool suite for integrated MEMS and ICs, which can help MEMS designers shorten design and validation time. This suite enables both accurate device design and systems design by providing 3D analysis tools as well as system level design tools inspired by VLSI CAD. This integrated MEMS CAD tool suite aids in implementing mixed-technology designs in multi signal and energy domains. Our MEMS CAD tools include: (1) physical design, (2) mixed-domain FEA enabling device analysis, (3) schematic design entry and system level behavioral simulation, (4) macromodel extraction, (5) placement and routing synthesis tools, and (6) layout extraction and DRC verification tools. The strength of our IC- enabled MEMS design suite is that it allows recursive simulation and verification between device level and system level design, which is very important for smart structures and sensory systems that require a lot of IC control circuitry. Examples of microtransducers design in smart structure applications are provided to demonstrate the design tools. Discussion of the merit and limitations of our tools are also included.