Holographic patterning of high-performance on-chip 3D lithium-ion microbatteries

Microscale batteries can deliver energy at the actual point of energy usage, providing capabilities for miniaturizing electronic devices and enhancing their performance. Here, we demonstrate a high-performance microbattery suitable for large-scale on-chip integration with both microelectromechanical and complementary metal-oxide–semiconductor (CMOS) devices. Enabled by a 3D holographic patterning technique, the battery possesses well-defined, periodically mesostructured porous electrodes. Such battery architectures offer both high energy and high power, and the 3D holographic patterning technique offers exceptional control of the electrode’s structural parameters, enabling customized energy and power for specific applications.