483.07P A Silicon Microsystem - Miniaturised Infrared Spectrometer

SUMMARY A miniaturised multipurpose infrared analyser has been developed. This comprises of an electrically modulatable infra-red source, an electrically tunable Fabry-Perot pass band filter, an integrated circuit and a photodetector, all silicon nnicrofabricated and assembled on the same silicon substrate. The infrared source and the detector are monolithically integrated in the substrate. The Fabry-Perot interferometer is flip-chip bonded and the IC-circuit wire-bonded. The whole spectrometer assembly is in a DIL package, having holes for the incoming and outgoing radiation. The dimensions of the spectrometer silicon substrate are 5x15 mm2.