Dynamic effects of linkage joints in electrostatic microengines

The electrostatic micro-engine is one of the major actuators used in MEMS applications. To ensure this MEMS actuator is operated in a fashion that will produce peak performance and long life, the system dynamics must be fully understood. One of the major trade-offs in the micro-engine design is the use of either pin or flexure joints. This paper will develop the equations of motion for flexure-jointed and pin-jointed surface micromachined microengines. An analytical mechanics approach will be used to derive the equations of motion and the appropriate equations of constraint. The effect of the flexure joints on the drive signals of the micro engine is experimentally shown to be significant during static tests.