Fine structure laminate, method for producing fine structure laminate, and method for producing fine structure

Fabrication of a microstructure structure capable of forming a fine concavo-convex structure excellent in environmental resistance, weather resistance, and long-term stability with a large area and high productivity, and fabrication of a microstructure structure using the microstructure structure To provide a method, and to provide a manufacturing method of a fine structure which has high productivity and can have a large area. The microstructure laminate of the present invention is provided on a base material, a resin layer having a fine concavo-convex structure on a surface thereof, and provided on the fine concavo-convex structure of the resin layer. An inorganic layer containing a sol-gel material having a fine concavo-convex structure having a shape corresponding to the fine concavo-convex structure of the resin layer, and the fluorine element concentration (Es) in the cured layer side region of the resin layer is It is characterized by being higher than the average fluorine concentration (Eb) in the resin layer.