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Microlithography Resists Containing Poly(1,1-dimethylsilazane) : Resist Material and Process
Microlithography Resists Containing Poly(1,1-dimethylsilazane) : Resist Material and Process
1989
Hiroyuki Hiraoka
Uri Ladabaum
Keywords:
Composite material
Resist
Materials science
Nanotechnology
Correction
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