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Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Films
Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Films
2019
Katja Väyrynen
Timo Hatanpää
Miika Mattinen
Kenichiro Mizohata
Kristoffer Meinander
J. Räisänen
Joosep Link
Raivo Stern
Mikko Ritala
Markku Leskelä
Keywords:
Thin film
Intermetallic
Atomic layer deposition
Inorganic chemistry
Materials science
Chemical engineering
Nanoparticle
Alloy
Diffusion barrier
Lithium
Tin oxide
Correction
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