Spot size and pulse number dependence of femtosecond laser ablation thresholds of silicon and stainless steel

Abstract Laser spot size and pulse number are two major parameters influencing the ablation of solids. The extended defect model describes the dependence of the threshold fluence on the basis of high and low density defects. This model was successfully applied to silicon and stainless steel. It is demonstrated that heat accumulation cannot describe the experimental results.