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Scanning Capacitance Microscopy Imaging of State-of-the-Art MOSFETs
Scanning Capacitance Microscopy Imaging of State-of-the-Art MOSFETs
2000
Rafael Nathan Kleiman
J. P. Garno
John Michael Hergenrother
M. L. O’Malley
G. Timp
Keywords:
Scanning probe microscopy
Scanning confocal electron microscopy
Analytical chemistry
Scanning capacitance microscopy
Scanning ion-conductance microscopy
Materials science
Scanning gate microscopy
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