Study of single deeply corrugated diaphragms for high-sensitivity microphones

In this paper, single deeply corrugated diaphragms (SDCDs) with various corrugation depths and initial stresses are studied extensively for applications to micromachined high-sensitivity devices. Finite-element model simulation results show that significant improvement in mechanical sensitivity can be achieved using a SDCD with larger corrugation depth. The diaphragm has been applied to the fabrication of a high-sensitivity microphone. The measurements show that the SDCD structure is promising in its applications to high-sensitivity devices.