Stable TiO x Submicrometer Channels

The fabrication of suhmicromeler, stable channels of radio-frequency sputtered metallic titanium and titanium oxide films with different stoichiometries is described in this work. The structure was obtained by coating the films on structures previously holographically recorded in photoresists on glass substrates, and subsequently dissolving the photoresist. Stable channel structures were obtained for all compositions of the TiO x films. For very thin films (10 nm thick) the structures recorded on TiO 2 presented less stability.