Photoelectrical characteristics of ultra thin TiO2/diamond photodetector

Abstract Characterization of UV photodetector on ultra thin TiO 2 /diamond has been carried out. TiO 2 film has been deposited on single crystal diamond surface through radio frequency magnetron sputtering method, upon which interdigitated electrodes were patterned to form the photodetector. The photodetector showed an obvious response selectivity between UV and visible regions, and exhibited two response peaks at around 225 nm and 290 nm which stemmed from the response of diamond and TiO 2 , respectively, indicating a stretch of detection range of pure diamond or TiO 2 photodetector. When TiO 2 film became thinner, the transient response performance was improved.