Nano scale tilt measurement using a polarizing phase shifting cyclic interferometer

Abstract This paper presents an improved method of high precision tilt measurement using a phase shifting cyclic interferometer. Tilt measurement with a cyclic interferometer is a highly stable and reliable experimental technique and tilts as low as 5 μrad has been reported using the same. Here we employ Polarizing Phase Shifting Interferometry (PPSI) as well as multiple reflections for improving the sensitivity. Using a combination of these two techniques tilts as low as 500 nrad has been measured.