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A22-022 A MEMS-BASED ACTIVE-HEAD SLIDER FOR FLYING HEIGHT CONTROL IN MAGNETIC RECORDING
A22-022 A MEMS-BASED ACTIVE-HEAD SLIDER FOR FLYING HEIGHT CONTROL IN MAGNETIC RECORDING
2003
Kenji Suzuki
Masayuki Kurita
Keywords:
Electronic engineering
Microelectromechanical systems
Materials science
Flying height
Acoustics
Slider
air bearing surface
Correction
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