Monte Carlo simulation of intermixed layer formed by ion beam enhanced deposition

Abstract A Monte Carlo simulation code SIBL has been used to simulate the intermixed layer formed during ion beam enhanced deposition (IBED). Depending on the simple collision cascade mixing model, the relations between the shape of the intermixed layer and the ion energy, the atomic arrival ratio and the incident angle have been investigated. A semi-empirical expression has been established, which is in agreement with Sigmund's analytical expression, indicating a quadratic dependence of the thickness of the intermixed layer on the ion fluence and the total elastic energy deposited in the interface region.