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Fabrication of nanoscale PMMA structure using vitrification by ion irradiated heating
Fabrication of nanoscale PMMA structure using vitrification by ion irradiated heating
2017
S. H. Min
H. T. Lee
K. H. Jang
H. J. Kim
S.H. Ahn
Keywords:
Focused ion beam
Irradiation
Nanoscopic scale
Differential scanning calorimetry
Analytical chemistry
Ion
Materials science
Vitrification
Fabrication
Nanotechnology
Correction
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